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1

Atomic-hydrogen cleaning of Sn from Mo/Si and DLC/Si extreme ultraviolet multilayer mirrors

Soer, Wouter A., van Herpen, Maarten M. J. W., Jak, Martin J. J., Gawlitza, Peter, Braun, Stefan, Salashchenko, Nikolay N., Chkhalo, Nikolay I., Banine, Vadim Y.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.42 MB

english, 2012

2

Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences

Malyshev, I. V., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Toropov, M. N., Chkhalo, N. I.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2018

Language:

english

File:

PDF, 1.46 MB

english, 2018

3

Determination of layered synthetic microstructure parameters

A.D. Akhsakhalyan, A.A. Fraerman, N.I. Polushkin, Yu.Ya. Platonov, N.N. Salashchenko

Journal:

Thin Solid Films

Year:

1991

Language:

english

File:

PDF, 444 KB

english, 1991

4

Diffusion in multilayer structures of metal-carbon superthin films

A.D. Akhsakhalyan, A.A. Fraerman, Yu.Ya. Platonov, N.I. Polushkin, N.N. Salashchenko

Journal:

Thin Solid Films

Year:

1992

Language:

english

File:

PDF, 452 KB

english, 1992

5

New modification of X-ray standing waves above the surface of layered substrates under total external reflection conditions for structural characterization of organic layers

S.I. Zheludeva, M.V. Kovalchuk, N.N. Novikova, A.N. Sosphenov, N.E. Malysheva, N.N. Salashchenko, A.D. Akhsakhalyan, Yu.Ya. Platonov

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 442 KB

english, 1993

6

High-resolution Auger depth profiling of multilayer structures MoSi, MoB4C, NiC

S.S. Andreev, A.D. Akhsakhalyan, M.N. Drozdov, N.I. Polushkin, N.N. Salashchenko

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 644 KB

english, 1995

7

Particulars of studying the roughness of substrates for multilayer X-ray optics using small-angle X-ray reflectometry, atomic-force, and interference microscopy

M. M. Barysheva, Yu. A. Vainer, B. A. Gribkov, M. V. Zorina, A. E. Pestov, D. N. Rogachev, N. N. Salashchenko, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2011

Language:

english

File:

PDF, 277 KB

english, 2011

8

Ferromagnetic Co-C nanodot arrays produced by direct interferometric laser annealing

Zheng, M., Yu, M., Liu, Y., Skomski, R., Liou, S.H., Sellmyer, D.J., Petryakov, V.N., Verevkin, Yu.K., Polushkin, N.I., Salashchenko, N.N.

Journal:

IEEE Transactions on Magnetics

Year:

2001

Language:

english

File:

PDF, 73 KB

english, 2001

9

Magnetic ordering in Fe-containing spinodally decomposing materials synthesized from laser plasma

Blyakhman, Yuri, Polushkin, N. I., Akhsakhalyan, A. D., Gusev, S. A., Salashchenko, N. N., Semenov, V. G.

Journal:

Physical Review B

Year:

1995

Language:

english

File:

PDF, 1.35 MB

english, 1995

10

Effect of polymer matrix and photoacid generator on the lithographic properties of chemically amplified photoresist

Bulgakova, S. A., Gurova, D. A., Zaitsev, S. D., Kulikov, E. E., Skorokhodov, E. V., Toropov, M. N., Pestov, A. E., Chkhalo, N. I., Salashchenko, N. N.

Journal:

Russian Microelectronics

Year:

2014

Language:

english

File:

PDF, 208 KB

english, 2014

11

The role of ultra-thin carbon barrier layers for fabrication of La/B4C interferential mirrors: Study by time-of-flight secondary ion mass spectrometry and high-resolution transmission electron microscopy

Drozdov, M.N., Drozdov, Y.N., Chkhalo, N.I., Polkovnikov, V.N., Salashchenko, N.N., Yunin, P.A., Roddatis, V.V., Tolstogouzov, A.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 2.93 MB

english, 2015

12

Source for extreme ultraviolet lithography based on plasma sustained by millimeter-wave gyrotron radiation

Chkhalo, Nikolay I., Golubev, Sergei V., Mansfeld, Dmitry, Salashchenko, Nikolay N., Sjmaenok, Leonid A., Vodopyanov, Alexander V.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.77 MB

english, 2012

13

Free-standing spectral purity filters for extreme ultraviolet lithography

Chkhalo, Nikolay I., Drozdov, Mikhail N., Kluenkov, Evgeny B., Lopatin, Aleksei Ya., Luchin, Valerii I., Salashchenko, Nikolay N., Tsybin, Nikolay N., Sjmaenok, Leonid A., Banine, Vadim E., Yakunin, A

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.70 MB

english, 2012

14

Note: A stand on the basis of atomic force microscope to study substrates for imaging optics

Chkhalo, N. I., Salashchenko, N. N., Zorina, M. V.

Journal:

Review of Scientific Instruments

Year:

2015

Language:

english

File:

PDF, 3.91 MB

english, 2015

15

Sub-micrometer resolution proximity X-ray microscope with digital image registration

Chkhalo, N. I., Pestov, A. E., Salashchenko, N. N., Sherbakov, A. V., Skorokhodov, E. V., Svechnikov, M. V.

Journal:

Review of Scientific Instruments

Year:

2015

Language:

english

File:

PDF, 5.98 MB

english, 2015

16

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution

Chkhalo, Nikolay I., Raskin, Denis G., Salashchenko, Nikolay N., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 217 KB

english, 2012

17

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic properties

Chkhalo, Nikolay I., Dorofeev, Illarion A., Salashchenko, Nikolay N., Toropov, Mikhail N., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 194 KB

english, 2012

18

SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Problems and prospects of maskless (B)EUV lithography

Lukichev, Vladimir F., Rudenko, Konstantin V., Chkhalo, N. I., Polkovnikov, V. N., Salashchenko, N. N., Toropov, M. N.

Year:

2016

Language:

english

File:

PDF, 449 KB

english, 2016

19

Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength

Chkhalo, N.I., Pariev, D.E., Polkovnikov, V.N., Salashchenko, N.N., Shaposhnikov, R.A., Stroulea, I.L., Svechnikov, M.V., Vainer, Yu.A., Zuev, S.Yu.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.22 MB

english, 2017

20

Study of heat induced changes in elastic properties of multilayer Mo/ZrSi 2 membranes

Chkhalo, N.I., Kluenkov, E.B., Lopatin, A.Ya., Luchin, V.I., Salashchenko, N.N., Sjmaenok, L.A., Tsybin, N.N.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.18 MB

english, 2017

21

Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography

Chkhalo, Nikolay, Polkovnikov, Vladimir, Salashchenko, Nikolay, Toropov, Mikhail

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2017

Language:

english

File:

PDF, 989 KB

english, 2017

22

Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes

Salashchenko, N. N., Chkhalo, N. I., Dyuzhev, N. A.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2018

Language:

english

File:

PDF, 662 KB

english, 2018

23

Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

Djuzhev, N. A., Demin, G. D., Filippov, N. A., Evsikov, I. D., Glagolev, P. Yu., Makhiboroda, M. A., Chkhalo, N. I., Salashchenko, N. N., Filippov, S. V., Kolosko, A. G., Popov, E. O., Bespalov, V. A.

Journal:

Technical Physics

Year:

2019

Language:

english

File:

PDF, 1.47 MB

english, 2019

24

Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Vainer, Yu. A., Garakhin, S. A., Zuev, S. Yu., Nechay, A. N., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Sertsu, M. G., Smertin, R. M., Sokolov, A., Chkhalo, N. I., S

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2020

File:

PDF, 1.39 MB

2020

25

Beryllium-based multilayer X-ray optics

Polkovnikov, V N, Salashchenko, N N, Svechnikov, M V, Chkhalo, N I

Journal:

Physics Uspekhi

Year:

2020

File:

PDF, 1.02 MB

2020

26

Development of Skills of Intercultural Communication in the Process of Studying at Higher Educational Institutions

Balanaieva, Oksana V., Salashchenko, Hanna M., Shurupova, Kateryna V., Devos, Anastasiia O., Romanchuk, Alla I.

Journal:

International Journal of Higher Education

Year:

2020

File:

PDF, 318 KB

2020

27

Features of multilayer mirror application for focusing and collimating X-rays from inverse Compton scattering sources

Barysheva, M M, Malyshev, I V, Polkovnikov, V N, Salashchenko, N N, Svechnikov, M V, Chkhalo, N I

Journal:

Quantum Electronics

Year:

2020

File:

PDF, 940 KB

2020

28

Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam

Garakhin, S. A., Zorina, M. V., Zuev, S. Yu., Mikhailenko, M. S., Pestov, A. E., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I.

Journal:

Technical Physics

Year:

2020

File:

PDF, 1005 KB

2020

29

Long-wave X-ray radiation mirrors

S.V. Gaponov, S.A. Gusev, B.M. Luskin, N.N. Salashchenko, E.S. Gluskin

Journal:

Optics Communications

Year:

1981

Language:

english

File:

PDF, 179 KB

english, 1981

30

Homoepitaxial superlattices with nonoriented barrier layers

S.V. Gaponov, B.M. Luskin, N.N. Salashchenko

Journal:

Solid State Communications

Year:

1981

Language:

english

File:

PDF, 197 KB

english, 1981

31

Multilayer mirrors for soft X-ray and VUV radiation

S.V. Gaponov, F.V. Garin, S.L. Gusev, A.V. Kochemasov, Yu.Ya. Platonov, N.N. Salashchenko, E.S. Gluskin

Journal:

Nuclear Instruments and Methods in Physics Research

Year:

1983

Language:

english

File:

PDF, 342 KB

english, 1983

32

Multilayer coated reflective optics for Extreme UV lithography

E. Louis, H.-J. Voorma, N.B. Koster, F. Bijkerk, Yu.Ya. Platonov, S.Yu. Zuev, S.S. Andreev, E.A. Shamov, N.N. Salashchenko

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 260 KB

english, 1995

33

Switching kinetics in epitaxial PZT thin films

V.Ya. Shur, S.D. Makarov, N.Yu. Ponomarev, V.V. Volegov, N.A. Tonkachyova, L.A. Suslov, N.N. Salashchenko, E.V. Kluenkov

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 345 KB

english, 1995

34

A polarimeter for soft X-ray and VUV radiation

E.S. Gluskin, S.V. Gaponov, P. Dhez, P.P. Ilyinsky, N.N. Salashchenko, Yu.M. Shatunov, E.M. Trakhtenberg

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1986

Language:

english

File:

PDF, 166 KB

english, 1986

35

Multilayer EUV/X-ray polychromators for plasma diagnostics

L.A. Shmaenok, Yu.Ya. Platonov, N.N. Salashchenko, A.A. Sorokin, D.M. Simanovskii, A.V. Golubev, V.P. Belik, S.V. Bobashev, F. Bijkerk, E. Louis, F.G. Meijer, B. Etlicher, A.Ya. Grudsky

Journal:

Journal of Electron Spectroscopy and Related Phenomena

Year:

1996

Language:

english

File:

PDF, 278 KB

english, 1996

36

Transmission type Sc/Cr multilayer as a quarter-wave plate for near 400 eV

H. Kimura, T. Hirono, Y. Tamenori, Y. Saitoh, N.N. Salashchenko, T. Ishikawa

Journal:

Journal of Electron Spectroscopy and Related Phenomena

Year:

2005

Language:

english

File:

PDF, 124 KB

english, 2005

37

Quadrelliptical reflector based on multilayer structures for the hard X-ray rang

A.A. Akhsakhalyan, A.D. Akhsakhalyan, A.I. Kharitonov, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2005

Language:

english

File:

PDF, 197 KB

english, 2005

38

Ultra-short period X-ray mirrors: Production and investigation

M.S. Bibishkin, N.I. Chkhalo, A.A. Fraerman, A.E. Pestov, K.A. Prokhorov, N.N. Salashchenko, Yu.A. Vainer

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2005

Language:

english

File:

PDF, 244 KB

english, 2005

39

Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

N.I. Chkhalo, E.B. Kluenkov, A.E. Pestov, V.N. Polkovnikov, D.G. Raskin, N.N. Salashchenko, L.A. Suslov, M.N. Toropov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 241 KB

english, 2009

40

Nuclear resonant reflectivity with standing waves for the investigation of a thin 57Fe layer buried inside a superconducting Si/[Mo/Si]45/57Fe/Nb multilayer

M.A. Andreeva, N.G. Monina, L. Häggström, B. Lindgren, B. Kalska, S. Kamali-M, S.N. Vdovichev, N.N. Salashchenko, V.G. Semenov, O. Leupold, R. Rüffer

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2008

Language:

english

File:

PDF, 1.47 MB

english, 2008

41

Short-period X-ray multilayers based on CrSc

N.N. Salashchenko, E.A. Shamov

Journal:

Optics Communications

Year:

1997

Language:

english

File:

PDF, 310 KB

english, 1997

42

On the possibility of the in situ growth control and nondestructive depth profiling of ultrathin multilayer structures using keV hydrogen ions

V.A Kurnaev, N.N Trifonov, M.N Drozdov, N.N Salashchenko

Journal:

Year:

2000

Language:

english

File:

PDF, 121 KB

english, 2000

43

Multilayer dispersion optics for X-ray radiation

S.S Andreev, H.-Ch Mertins, Yu.Ya Platonov, N.N Salashchenko, F Schaefers, E.A Shamov, L.A Shmaenok

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2000

Language:

english

File:

PDF, 313 KB

english, 2000

44

PMMA-based resists for a spectral range near 13 nm

S.A Bulgakova, A.Ya Lopatin, V.I Luchin, L.M Mazanova, S.A Molodnjakov, N.N Salashchenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2000

Language:

english

File:

PDF, 155 KB

english, 2000

45

Cr/Sc nanolayers for the water window: improved performance

F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H.-Ch. Mertins, N.N. Salashchenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2001

Language:

english

File:

PDF, 150 KB

english, 2001

46

Stress reduction of Mo/Si multilayer structures

S.S. Andreev, N.N. Salashchenko, L.A. Suslov, A.N. Yablonsky, S.Yu. Zuev

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2001

Language:

english

File:

PDF, 126 KB

english, 2001

47

Short-period X-ray multilayers based on Cr/Sc, W/Sc

N.N. Salashchenko, A.A. Fraerman, S.V. Mitenin, K.A. Prokhorov, E.A. Shamov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1998

Language:

english

File:

PDF, 560 KB

english, 1998

48

Amorphous magnetic films for broadband γ-filters of synchrotron radiation

K.A. Prokhorov, N.I. Polushkin, N.N. Salashchenko, V.G. Semenov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1998

Language:

english

File:

PDF, 414 KB

english, 1998

49

Absolute radiometry technique for VUV and SXR radiation fluxes

S. V. Bobashev, N. N. Salashchenko, L. A. Shmaenok

Journal:

Zeitschrift für Physik D Atoms, Molecules and Clusters

Year:

1991

Language:

english

File:

PDF, 384 KB

english, 1991

50

Simulation of the intensity of X-ray tube radiation in soft X-ray and extreme UV regions

A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2008

Language:

english

File:

PDF, 147 KB

english, 2008